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IPS provided design and construction services for a new 30,000-sq ft. temperature controlled ultrapure water and waste neutralization in a single-story central utility plant. The addition had a partially enclosed utility yard. The project consisted of a UPW system capable of 1,200 gpm, polish loop flowrate, and UPW reclaim system with 300 gpm capacity. The DI water system consisted of 150 gpm supply. The design fed the chemical mechanical planarization (CMP) equipment with sub-UPW quality water (150 gpm).

The AWN system had 1,000 gpm discharge capacity and the HF waste treatment plant had 50 gpm capacity. The scrubber blowdown recycle system had capabilities of processing 200 gpm blowdown. IPS designed and built a new utility building for process water (UPW, AWN, reclaim, recycle, CMP) systems, as well as designing and constructing process water distribution and collection piping to tie into existing systems. There was a 50%+ water recycle/re-use requirement for design. The project was designed and modeled in Revit, with IPS modeling the entire systems to a level of development (LOD) of 300 and the support of our subcontractor the project was model to BIM LOD 400.

Beaverton, OR

High Tech

30,000 sf